| Kieli | Käännökset |
|---|---|
| italia | fotolitografia |
| ranska | photolithographie |
(microelectronics) An optical exposure process used in the manufacture of integrated circuits.
Simplified illustration of dry etching using positive photoresist during a photolithography process in semiconductor microfabrication (not to scale).
(microelectronics) An optical exposure process used in the manufacture of integrated circuits.
The wafer track portion of an aligner that uses 365 nm ultraviolet light.
(microelectronics) An optical exposure process used in the manufacture of integrated circuits.
The filtered fluorescent lighting, yellow LED or low-pressure sodium lighting in photolithography cleanrooms contains no ultraviolet or blue light in order to avoid exposing photoresists. The spectrum of light emitted by such fixtures gives virtually all such spaces a bright yellow color.